TY  - RPRT
TI  - Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma
AU  - Hongyu Wang
AU  - Wei Jiang
AU  - Zhenhua Bi
AU  - Younian Wang
PY  - 2009
UR  - https://arxiv.org/abs/0912.5129
ID  - 0912.5129
ER  -