@misc{indiciaeb7f76b66c56f,
  title = {A Study of VLSI Technology, Wafers and Impact on Nanotechnology},
  author = {Kiran Gupta and T. R. Gopalakrishnan Nair},
  year = {2010},
  url = {https://arxiv.org/abs/1001.3771},
  note = {Source identifier: 1001.3771}
}