@misc{indiciae5306fcb53fee,
  title = {ESR studies of ion implanted phosphorus donors near the Si-SiO2 interface},
  author = {Paul G. Spizzirri and Wayne D. Hutchison and Nikolas Stavrias and Jeffrey C. McCallum and Nakorn Suwuntanasarn and Libu K. Alexander and Steven Prawer},
  year = {2010},
  url = {https://arxiv.org/abs/1002.1764},
  note = {Source identifier: 1002.1764}
}