@misc{indiciae1a85ca003fe5, title = {Performance Analysis and Optimization of Lumped Parameters of Electrostatic Actuators for Optical MEMS Switches}, author = {D. Mohana Geetha and M. Madheswaran}, year = {2010}, url = {https://arxiv.org/abs/1002.2224}, note = {Source identifier: 1002.2224} }