TY  - RPRT
TI  - Performance Analysis and Optimization of Lumped Parameters of Electrostatic Actuators for Optical MEMS Switches
AU  - D. Mohana Geetha
AU  - M. Madheswaran
PY  - 2010
UR  - https://arxiv.org/abs/1002.2224
ID  - 1002.2224
ER  -