@misc{indiciae653bf15b5d09,
  title = {Analysis of an Inverse Problem Arising in Photolithography},
  author = {Luca Rondi and Fadil Santosa},
  year = {2010},
  doi = {10.1142/s0218202511500266},
  url = {https://arxiv.org/abs/1002.4059},
  note = {Source identifier: 1002.4059}
}