TY  - RPRT
TI  - Analysis of an Inverse Problem Arising in Photolithography
AU  - Luca Rondi
AU  - Fadil Santosa
PY  - 2010
DO  - 10.1142/s0218202511500266
UR  - https://arxiv.org/abs/1002.4059
ID  - 1002.4059
ER  -