@misc{indiciaec49ea769e57e,
  title = {In-situ direct visualization of irradiated e-beam patterns on unprocessed resists using atomic force microscopy},
  author = {H. Koop and D. Schnurbusch and M. Mueller and T. Gruendl and M. Zech and M. -C. Amann and K. Karrai and A. W. Holleitner},
  year = {2010},
  doi = {10.1116/1.3457938},
  url = {https://arxiv.org/abs/1003.0796},
  note = {Source identifier: 1003.0796}
}