TY  - RPRT
TI  - In-situ direct visualization of irradiated e-beam patterns on unprocessed resists using atomic force microscopy
AU  - H. Koop
AU  - D. Schnurbusch
AU  - M. Mueller
AU  - T. Gruendl
AU  - M. Zech
AU  - M. -C. Amann
AU  - K. Karrai
AU  - A. W. Holleitner
PY  - 2010
DO  - 10.1116/1.3457938
UR  - https://arxiv.org/abs/1003.0796
ID  - 1003.0796
ER  -