@misc{indiciaed4dcf3408c00,
  title = {Grazing incidence interaction of Sn particles with EUV Lithography ruthenium mirrors},
  author = {Valentino Rigato},
  year = {2010},
  url = {https://arxiv.org/abs/1003.3763},
  note = {Source identifier: 1003.3763}
}