@misc{indiciae1391631683c2,
  title = {Titanium Nitride Films for Ultrasensitive Microresonator Detectors},
  author = {Henry G. Leduc and Bruce Bumble and Peter K. Day and Anthony D. Turner and Byeong Ho Eom and Sunil Golwala and David C. Moore and Omid Noroozian and Jonas Zmuidzinas and Jiansong Gao and Benjamin A. Mazin and Sean McHugh and Andrew Merrill},
  year = {2010},
  doi = {10.1063/1.3480420},
  url = {https://arxiv.org/abs/1003.5584},
  note = {Source identifier: 1003.5584}
}