@misc{indiciae62e978b76430,
  title = {Pressure-dependent transition from atoms to nanoparticles in magnetron sputtering: Effect on WSi2 film roughness and stress},
  author = {Lan Zhou and Yiping Wang and Hua Zhou and Minghao Li and Randall L. Headrick and Kimberly MacArthur and Bing Shi and Ray Conley and Albert T. Macrander},
  year = {2010},
  doi = {10.1103/physrevb.82.075408},
  url = {https://arxiv.org/abs/1005.2708},
  note = {Source identifier: 1005.2708}
}