TY  - RPRT
TI  - Pressure-dependent transition from atoms to nanoparticles in magnetron sputtering: Effect on WSi2 film roughness and stress
AU  - Lan Zhou
AU  - Yiping Wang
AU  - Hua Zhou
AU  - Minghao Li
AU  - Randall L. Headrick
AU  - Kimberly MacArthur
AU  - Bing Shi
AU  - Ray Conley
AU  - Albert T. Macrander
PY  - 2010
DO  - 10.1103/physrevb.82.075408
UR  - https://arxiv.org/abs/1005.2708
ID  - 1005.2708
ER  -