@misc{indiciaea154bca60c8e,
  title = {Advances in Modeling of Scanning Charged-Particle-Microscopy Images},
  author = {Petr Cizmar and Andras E. Vladar and Michael T. Postek},
  year = {2010},
  doi = {10.1117/12.861064},
  url = {https://arxiv.org/abs/1006.0171},
  note = {Source identifier: 1006.0171}
}