@misc{indiciae38f4109acf1f,
  title = {On the efficiency of quantum lithography},
  author = {Christian Kothe and Gunnar Björk and Shuichiro Inoue and Mohamed Bourennane},
  year = {2011},
  doi = {10.1088/1367-2630/13/4/043028},
  url = {https://arxiv.org/abs/1006.2250},
  note = {Source identifier: 1006.2250}
}