TY  - RPRT
TI  - On the efficiency of quantum lithography
AU  - Christian Kothe
AU  - Gunnar Björk
AU  - Shuichiro Inoue
AU  - Mohamed Bourennane
PY  - 2011
DO  - 10.1088/1367-2630/13/4/043028
UR  - https://arxiv.org/abs/1006.2250
ID  - 1006.2250
ER  -