@misc{indiciae964a6b2fe5cd, title = {Ex-situ Tunnel Junction Process Technique Characterized by Coulomb Blockade Thermometry}, author = {M. Prunnila and M. Meschke and D. Gunnarsson and S. Enouz-Vedrenne and J. M. Kivioja and J. P. Pekola}, year = {2010}, doi = {10.1116/1.3490406}, url = {https://arxiv.org/abs/1006.2436}, note = {Source identifier: 1006.2436} }