TY - RPRT TI - Ex-situ Tunnel Junction Process Technique Characterized by Coulomb Blockade Thermometry AU - M. Prunnila AU - M. Meschke AU - D. Gunnarsson AU - S. Enouz-Vedrenne AU - J. M. Kivioja AU - J. P. Pekola PY - 2010 DO - 10.1116/1.3490406 UR - https://arxiv.org/abs/1006.2436 ID - 1006.2436 ER -