@misc{indiciae0763f8fac7d8,
  title = {Independent individual addressing of multiple neutral atom qubits with a MEMS beam steering system},
  author = {Caleb Knoernschild and Xianli L. Zhang and Larry Isenhower and Alex T. Gill and Felix P. Lu and Mark Saffman and Jungsang Kim},
  year = {2010},
  doi = {10.1063/1.3494526},
  url = {https://arxiv.org/abs/1006.2757},
  note = {Source identifier: 1006.2757}
}