TY - RPRT TI - Independent individual addressing of multiple neutral atom qubits with a MEMS beam steering system AU - Caleb Knoernschild AU - Xianli L. Zhang AU - Larry Isenhower AU - Alex T. Gill AU - Felix P. Lu AU - Mark Saffman AU - Jungsang Kim PY - 2010 DO - 10.1063/1.3494526 UR - https://arxiv.org/abs/1006.2757 ID - 1006.2757 ER -