TY  - RPRT
TI  - Electrostatic actuation of silicon optomechanical resonators
AU  - Suresh Sridaran
AU  - Sunil A. Bhave
PY  - 2011
DO  - 10.1364/oe.19.009020
UR  - https://arxiv.org/abs/1006.2783
ID  - 1006.2783
ER  -