@misc{indiciaecc0646d5a445,
  title = {Theoretical and experimental study of ion flux formation in an asymmetric high-frequency capacitive discharge},
  author = {I. V. Schweigert and D. A. Ariskin and T. V. Chernoiziumskaya and A. S. Smirnov},
  year = {2010},
  doi = {10.1088/0963-0252/20/1/015011},
  url = {https://arxiv.org/abs/1006.5521},
  note = {Source identifier: 1006.5521}
}