TY  - RPRT
TI  - Theoretical and experimental study of ion flux formation in an asymmetric high-frequency capacitive discharge
AU  - I. V. Schweigert
AU  - D. A. Ariskin
AU  - T. V. Chernoiziumskaya
AU  - A. S. Smirnov
PY  - 2010
DO  - 10.1088/0963-0252/20/1/015011
UR  - https://arxiv.org/abs/1006.5521
ID  - 1006.5521
ER  -