@misc{indiciae9576bfd12207,
  title = {Chip-scale nanofabrication of single spins and spin arrays in diamond},
  author = {David M. Toyli and Christoph D. Weis and Gregory D. Fuchs and Thomas Schenkel and David D. Awschalom},
  year = {2010},
  doi = {10.1021/nl102066q},
  url = {https://arxiv.org/abs/1007.0240},
  note = {Source identifier: 1007.0240}
}