TY - RPRT TI - Chip-scale nanofabrication of single spins and spin arrays in diamond AU - David M. Toyli AU - Christoph D. Weis AU - Gregory D. Fuchs AU - Thomas Schenkel AU - David D. Awschalom PY - 2010 DO - 10.1021/nl102066q UR - https://arxiv.org/abs/1007.0240 ID - 1007.0240 ER -