@misc{indiciaea2a8effadd70, title = {Low Loss Superconducting Titanium Nitride Coplanar Waveguide Resonators}, author = {Michael R. Vissers and Jiansong Gao and David S. Wisbey and Dustin A. Hite and Chang C. Tsuei and Antonio D. Corcoles and Matthias Steffen and David P. Pappas}, year = {2010}, doi = {10.1063/1.3517252}, url = {https://arxiv.org/abs/1007.5096}, note = {Source identifier: 1007.5096} }