@misc{indiciae6840e4e51fc5,
  title = {Dopant-enhanced solid phase epitaxy in buried amorphous silicon layers},
  author = {B. C. Johnson and J. C. McCallum},
  year = {2010},
  doi = {10.1103/physrevb.76.045216},
  url = {https://arxiv.org/abs/1007.5372},
  note = {Source identifier: 1007.5372}
}