@misc{indiciae3630d81d7fe8,
  title = {Design and Focused Ion Beam Fabrication of Single Crystal Diamond Nanobeam Cavities},
  author = {T. M. Babinec and J. T. Choy and K. J. M. Smith and M. Khan and M. Loncar},
  year = {2010},
  doi = {10.1116/1.3520638},
  url = {https://arxiv.org/abs/1008.1431},
  note = {Source identifier: 1008.1431}
}