@misc{indiciae8f2c3c9f324e,
  title = {Resonance frequency dependence on out-of-plane forces for square silicon membranes: applications to a MEMS gradiometer},
  author = {I. Lucas and R. P. del Real and M. D. Michelena and V. de Manuel and M. Duch and J. Esteve and J. A. Plaza},
  year = {2010},
  url = {https://arxiv.org/abs/1008.2296},
  note = {Source identifier: 1008.2296}
}