@misc{indiciaedc098a96a322,
  title = {Role of dislocations in scattering of charge carriers in mechanical polishing damaged layers of silicon wafers},
  author = {Vladimir Yuryev},
  year = {2010},
  doi = {10.1023/a:1009421825142},
  url = {https://arxiv.org/abs/1008.2676},
  note = {Source identifier: 1008.2676}
}