TY  - RPRT
TI  - Role of dislocations in scattering of charge carriers in mechanical polishing damaged layers of silicon wafers
AU  - Vladimir Yuryev
PY  - 2010
DO  - 10.1023/a:1009421825142
UR  - https://arxiv.org/abs/1008.2676
ID  - 1008.2676
ER  -