@misc{indiciae62ce311e122d,
  title = {Possibilities of application of elastic mid-IR light scattering for inspection of internal gettering operations},
  author = {O. V. Astafiev and A. N. Buzynin and V. P. Kalinushkin and D. I. Murin and V. A. Yuryev},
  year = {2010},
  url = {https://arxiv.org/abs/1008.4534},
  note = {Source identifier: 1008.4534}
}