@misc{indiciae1d8e87d0f9eb,
  title = {Aluminum Hard Mask Technique for the Fabrication of High-Quality Submicron Nb/Al-AlOx/Nb Josephson Junctions},
  author = {Christoph Kaiser and J. M. Meckbach and K. Ilin and J. Lisenfeld and R. Schäfer and A. V. Ustinov and M. Siegel},
  year = {2010},
  doi = {10.1088/0953-2048/24/3/035005},
  url = {https://arxiv.org/abs/1009.0167},
  note = {Source identifier: 1009.0167}
}