@misc{indiciae31e39b5892da, title = {Molecular Dynamics Simulation of Chemical Vapor Deposition of Amorphous Carbon: Dependence on H/C Ratio of Source Gas}, author = {Atsushi M. Ito and Arimichi Takayama and Seiki Saito and Noriyasu Ohno and Shin Kajita and Hiroaki Nakamura}, year = {2010}, doi = {10.1143/jjap.50.01ab01}, url = {https://arxiv.org/abs/1009.1508}, note = {Source identifier: 1009.1508} }