@misc{indiciae0efcc6b102e9,
  title = {Doping Dependence of Thermal Oxidation on n-type 4H-SiC},
  author = {B. K. Daas and M. M. Islam and I. A. Chowdhury and F. Zhao and T. S. Sudarshan and M. V. S. Chandrashekhar},
  year = {2010},
  doi = {10.1109/ted.2010.2088270},
  url = {https://arxiv.org/abs/1010.0473},
  note = {Source identifier: 1010.0473}
}