@misc{indiciae5b0f3ce11478, title = {Diffusion stop-layers for superconducting integrated circuits and qubits with Nb-based Josephson junctions}, author = {Sergey K. Tolpygo and Denis Amparo and Richard T. Hunt and John A. Vivalda and Daniel T. Yohannes}, year = {2010}, doi = {10.1109/tasc.2010.2089665}, url = {https://arxiv.org/abs/1010.5449}, note = {Source identifier: 1010.5449} }