@misc{indiciaea53a42ed9617,
  title = {Fabrication and characterization of high quality factor silicon nitride nanobeam cavities},
  author = {Mughees Khan and Thomas Babinec and Murray W. McCutcheon and Parag Deotare and Marko Lončar},
  year = {2010},
  doi = {10.1364/ol.36.000421},
  url = {https://arxiv.org/abs/1010.6287},
  note = {Source identifier: 1010.6287}
}