TY  - RPRT
TI  - Fabrication and characterization of high quality factor silicon nitride nanobeam cavities
AU  - Mughees Khan
AU  - Thomas Babinec
AU  - Murray W. McCutcheon
AU  - Parag Deotare
AU  - Marko Lončar
PY  - 2010
DO  - 10.1364/ol.36.000421
UR  - https://arxiv.org/abs/1010.6287
ID  - 1010.6287
ER  -