TY  - RPRT
TI  - Characteristics of the Sculptured Cu Thin Films and Their Optical Properties as a function of deposition rate
AU  - H. Savaloni
AU  - F. Babaei
AU  - S. Song
AU  - F. Placido
PY  - 2010
DO  - 10.1016/j.apsusc.2009.05.011
UR  - https://arxiv.org/abs/1011.1616
ID  - 1011.1616
ER  -