@misc{indiciaec7976207f579,
  title = {Interface Trap Density Metrology of state-of-the-art undoped Si n-FinFETs},
  author = {Giuseppe Carlo Tettamanzi and Abhijeet Paul and Sunhee Lee and Saumitra R. Mehrotra and Nadine Collaert and Serge Biesemans and Gerhard Klimeck and Sven Rogge},
  year = {2010},
  url = {https://arxiv.org/abs/1011.2582},
  note = {Source identifier: 1011.2582}
}