@misc{indiciaef5e17ce57c27,
  title = {Reduced basis method for computational lithography},
  author = {J. Pomplun and L. Zschiedrich and S. Burger and F. Schmidt},
  year = {2010},
  doi = {10.1117/12.829639},
  url = {https://arxiv.org/abs/1011.2654},
  note = {Source identifier: 1011.2654}
}