TY  - RPRT
TI  - Metrology of EUV Masks by EUV-Scatterometry and Finite Element Analysis
AU  - J. Pomplun
AU  - S. Burger
AU  - F. Schmidt
AU  - F. Scholze
AU  - C. Laubis
AU  - U. Dersch
PY  - 2010
DO  - 10.1117/12.793032
UR  - https://arxiv.org/abs/1011.2665
ID  - 1011.2665
ER  -