@misc{indiciae6ac5441c3b3e,
  title = {Reduced basis method for source mask optimization},
  author = {J. Pomplun and L. Zschiedrich and S. Burger and F. Schmidt and J. Tyminski and D. Flagello and N. Toshiharu},
  year = {2010},
  doi = {10.1117/12.866101},
  url = {https://arxiv.org/abs/1011.2902},
  note = {Source identifier: 1011.2902}
}