@misc{indiciaecbcedf0c42ce,
  title = {Bond-specific reaction kinetics during the oxidation of (111) Si: Effect of n-type doping},
  author = {Bilal Gokce and David E. Aspnes and Gerald Lucovsky and Kenan Gundogdu},
  year = {2010},
  doi = {10.1063/1.3537809},
  url = {https://arxiv.org/abs/1011.4386},
  note = {Source identifier: 1011.4386}
}