TY - RPRT TI - Bond-specific reaction kinetics during the oxidation of (111) Si: Effect of n-type doping AU - Bilal Gokce AU - David E. Aspnes AU - Gerald Lucovsky AU - Kenan Gundogdu PY - 2010 DO - 10.1063/1.3537809 UR - https://arxiv.org/abs/1011.4386 ID - 1011.4386 ER -