TY  - RPRT
TI  - Topographic phase boundary shifts and saturation for anisotropic ion straggle during sputter etching
AU  - Emmanuel O. Yewande
AU  - Raphael O. Akande
PY  - 2010
UR  - https://arxiv.org/abs/1011.6234
ID  - 1011.6234
ER  -