@misc{indiciaeba47d213ec65,
  title = {Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations},
  author = {Alessandro Speranza and Luigi Barletti and Luca Meacci and Stefano Fanfani and Iacopo Borsi and Alessandro Monti},
  year = {2010},
  doi = {10.1007/s11012-010-9330-z},
  url = {https://arxiv.org/abs/1012.1170},
  note = {Source identifier: 1012.1170}
}