TY  - RPRT
TI  - Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations
AU  - Alessandro Speranza
AU  - Luigi Barletti
AU  - Luca Meacci
AU  - Stefano Fanfani
AU  - Iacopo Borsi
AU  - Alessandro Monti
PY  - 2010
DO  - 10.1007/s11012-010-9330-z
UR  - https://arxiv.org/abs/1012.1170
ID  - 1012.1170
ER  -