@misc{indiciae25f8e86d8f3d, title = {Interface trap density metrology from sub-threshold transport in highly scaled undoped Si n-FinFETs}, author = {Abhijeet Paul and Giuseppe C. Tettamanzi and Sunhee Lee and Saumitra Mehrotra and Nadine Colleart and Serge Biesemans and Sven Rogge and Gerhard Klimeck}, year = {2011}, doi = {10.1063/1.3660697}, url = {https://arxiv.org/abs/1102.0140}, note = {Source identifier: 1102.0140} }