TY  - RPRT
TI  - Interface trap density metrology from sub-threshold transport in highly scaled undoped Si n-FinFETs
AU  - Abhijeet Paul
AU  - Giuseppe C. Tettamanzi
AU  - Sunhee Lee
AU  - Saumitra Mehrotra
AU  - Nadine Colleart
AU  - Serge Biesemans
AU  - Sven Rogge
AU  - Gerhard Klimeck
PY  - 2011
DO  - 10.1063/1.3660697
UR  - https://arxiv.org/abs/1102.0140
ID  - 1102.0140
ER  -